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1

Correspondence Between Geometric and Differential Definitions of the Sine and Cosine

Buron, Jonas D., Pizzocchero, Filippo, Jessen, Bjarke S., Booth, Timothy J., Nielsen, Peter F., Hansen, Ole, Hilke, Michael, Whiteway, Eric, Jepsen, Peter U., Bøggild, Peter, Petersen, Dirch H.

Journal:

College Mathematics Journal

Year:

2014

Language:

english

File:

PDF, 305 KB

english, 2014

2

In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule Heating

Homann, Lasse V., Booth, Tim, Lei, Anders, Petersen, Dirch Hjorth, Davis, Zachary J., Boggild, Peter

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 630 KB

english, 2011

3

Ultra Shallow Arsenic Junctions in Germanium Formed by Millisecond Laser Annealing

Hellings, Geert, Rosseel, Erik, Simoen, Eddy, Radisic, Dunja, Petersen, Dirch Hjorth, Hansen, Ole, Nielsen, Peter Folmer, Zschätzsch, Gerd, Nazir, Aftab, Clarysse, Trudo, Vandervorst, Wilfried, Hoffm

Journal:

Electrochemical and Solid-State Letters

Year:

2011

Language:

english

File:

PDF, 266 KB

english, 2011

4

Optimization of FIB milling for rapid NEMS prototyping

Bjarke Malm, Dirch H. Petersen, Anders Lei, Timothy J. Booth, Lasse V. Homann, Peter Bøggild

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 593 KB

english, 2011

5

Simulated SAM A-scans on multilayer MEMS components

Jakob Janting, Dirch Hjorth Petersen, Christoffer Greisen

Journal:

Microelectronics Reliability

Year:

2002

File:

PDF, 974 KB

2002

6

[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

Rosseel, Erik, Petersen, Dirch H., Osterberg, Frederik W., Hansen, Ole, Bogdanowicz, Janusz, Clarysse, Trudo, Vandervorst, Wilfried, Ortolland, Claude, Hoffmann, Thomas, Chan, Philip, Salnik, Alex, Ni

Year:

2009

Language:

english

File:

PDF, 920 KB

english, 2009

7

[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study

Wang, Fei, Petersen, Dirch H., Osterberg, Frederik W., Hansen, Ole

Year:

2009

Language:

english

File:

PDF, 449 KB

english, 2009

8

[IEEE 2006 14th International Conference on Advanced Thermal Processing of Semiconductors - Kyoto (2006.10.10-2006.10.13)] 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Micro-Scale Sheet Resistance Measurements on Ultra Shallow Junctions

Petersen, Christian L., Lin, Rong, Petersen, Dirch H., Nielsen, Peter F.

Year:

2006

Language:

english

File:

PDF, 1.57 MB

english, 2006

9

Topology optimized electrothermal polysilicon microgrippers

Ozlem Sardan, Dirch H. Petersen, Kristian Mølhave, Ole Sigmund, Peter Bøggild

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 543 KB

english, 2008

10

Fundamental size limitations of micro four-point probes

Thor Ansbæk, Dirch H. Petersen, Ole Hansen, Jakob B. Larsen, Torben M. Hansen, Peter Bøggild

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 241 KB

english, 2009

11

Systematic study of shallow junction formation on germanium substrates

Geert Hellings, Erik Rosseel, Trudo Clarysse, Dirch Hjorth Petersen, Ole Hansen, Peter Folmer Nielsen, Eddy Simoen, Geert Eneman, Brice De Jaeger, Thomas Hoffmann, Kristin De Meyer, Wilfried Vandervor

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 398 KB

english, 2011

12

Static contact micro four-point probes with

Dirch H. Petersen, Ole Hansen, Torben M. Hansen, Peter R.E. Petersen, Peter Bøggild

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 364 KB

english, 2008

13

Epitaxial Integration of Nanowires in Microsystems by Local Micrometer-Scale Vapor-Phase Epitaxy

Kristian Mølhave, Brent A. Wacaser, Dirch Hjorth Petersen, Jakob B. Wagner, Lars Samuelson, Peter Bøggild

Journal:

Year:

2008

Language:

english

File:

PDF, 428 KB

english, 2008

14

Graphene Conductance Uniformity Mapping

Buron, Jonas D., Petersen, Dirch H., Bøggild, Peter, Cooke, David G., Hilke, Michael, Sun, Jie, Whiteway, Eric, Nielsen, Peter F., Hansen, Ole, Yurgens, August, Jepsen, Peter U.

Journal:

Year:

2012

Language:

english

File:

PDF, 3.52 MB

english, 2012

15

Accurate microfour-point probe sheet resistance measurements on small samples

Thorsteinsson, Sune, Wang, Fei, Petersen, Dirch H., Hansen, Torben Mikael, Kjær, Daniel, Lin, Rong, Kim, Jang-Yong, Nielsen, Peter F., Hansen, Ole

Journal:

Review of Scientific Instruments

Year:

2009

Language:

english

File:

PDF, 918 KB

english, 2009

16

Electrothermal microgrippers for pick-and-place operations

Karin. N. Andersen, Kenneth Carlson, Dirch H. Petersen, Kristian Mølhave, Volkmar Eichhorn, Sergej Fatikow, Peter Bøggild

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 341 KB

english, 2008

17

Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper

Cagliani, Alberto, Wierzbicki, Rafal, Occhipinti, Luigi, Petersen, Dirch Hjorth, Dyvelkov, Karin Nordstrøm, Sardan Sukas, Özlem, Herstrøm, Berit G, Booth, Tim, Bøggild, Peter

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 1.43 MB

english, 2010

18

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

Savenko, Alexey, Yildiz, Izzet, Petersen, Dirch Hjorth, Bøggild, Peter, Bartenwerfer, Malte, Krohs, Florian, Oliva, Maria, Harzendorf, Torsten

Journal:

Year:

2013

Language:

english

File:

PDF, 913 KB

english, 2013

19

Theoretical Analysis of a Dual-Probe Scanning Tunneling Microscope Setup on Graphene

Settnes, Mikkel, Power, Stephen R., Petersen, Dirch H., Jauho, Antti-Pekka

Journal:

Physical Review Letters

Year:

2014

Language:

english

File:

PDF, 1.50 MB

english, 2014

20

Study of the Roughness in a Photoresist Masked, Isotropic, SF[sub 6]-Based ICP Silicon Etch

Larsen, Kristian P., Petersen, Dirch Hjorth, Hansen, Ole

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 788 KB

english, 2006

21

Electrically Continuous Graphene from Single Crystal Copper Verified by Terahertz Conductance Spectroscopy and Micro Four-Point Probe

Buron, Jonas D., Pizzocchero, Filippo, Jessen, Bjarke S., Booth, Timothy J., Nielsen, Peter F., Hansen, Ole, Hilke, Michael, Whiteway, Eric, Jepsen, Peter U., Bøggild, Peter, Petersen, Dirch H.

Journal:

Year:

2014

Language:

english

File:

PDF, 937 KB

english, 2014

22

[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Precision of single-engage micro Hall effect measurements

Henrichsen, Henrik H., Hansen, Ole, Kjaer, Daniel, Nielsen, Peter F., Wang, Fei, Petersen, Dirch H.

Year:

2014

Language:

english

File:

PDF, 315 KB

english, 2014

23

[IEEE 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2012) - Wollongong, NSW, Australia (2012.09.23-2012.09.28)] 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves - Quantitative mapping of large area graphene conductance

Buron, Jonas D., Petersen, Dirch H., Boggild, Peter, Cooke, David G., Hilke, Michael, Sun, Jie, Whiteway, Eric, Hansen, Ole, Nielsen, Peter F., Yurgens, August, Jepsen, Peter U.

Year:

2012

Language:

english

File:

PDF, 812 KB

english, 2012

24

Customizable in situ TEM devices fabricated in freestanding membranes by focused ion beam milling

Lei, Anders, Petersen, Dirch Hjorth, Booth, Timothy John, Homann, Lasse Vinther, Kallesoe, Christian, Sukas, Ozlem Sardan, Gyrsting, Yvonne, Molhave, Kristian, Boggild, Peter

Journal:

Year:

2010

Language:

english

File:

PDF, 1.45 MB

english, 2010

25

Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Petersen, Dirch Hjorth, Lin, Rong, Hansen, Torben Mikael, Rosseel, Erik, Vandervorst, Wilfried, Markvardsen, Christian, Kjær, Daniel, Nielsen, Peter Folmer

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2008

Language:

english

File:

PDF, 749 KB

english, 2008

26

Dual-probe spectroscopic fingerprints of defects in graphene

Settnes, Mikkel, Power, Stephen R., Petersen, Dirch H., Jauho, Antti-Pekka

Journal:

Physical Review B

Year:

2014

Language:

english

File:

PDF, 757 KB

english, 2014

27

Revealing origin of quasi-one dimensional current transport in defect rich two dimensional materials

Lotz, Mikkel R., Boll, Mads, Hansen, Ole, Kjær, Daniel, Bøggild, Peter, Petersen, Dirch H.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 1.44 MB

english, 2014

28

Sensitivity of resistive and Hall measurements to local inhomogeneities

Koon, Daniel W., Wang, Fei, Hjorth Petersen, Dirch, Hansen, Ole

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.16 MB

english, 2013

29

Sensitivity study of micro four-point probe measurements on small samples

Wang, Fei, Petersen, Dirch H., Hansen, Torben M., Henriksen, Toke R., Bo̸ggild, Peter, Hansen, Ole

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 4.15 MB

english, 2010

30

Micro-four-point probe Hall effect measurement method

Petersen, Dirch H., Hansen, Ole, Lin, Rong, Nielsen, Peter F.

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 790 KB

english, 2008

31

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch H., Hansen, Ole, Hansen, Torben M., Bo̸ggild, Peter, Lin, Rong, Kjær, Daniel, Nielsen, Peter F., Clarysse, Trudo, Vandervorst, Wilfried, Rosseel, Erik, Bennett, Nick S., Cowern, Nick E

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 728 KB

english, 2010

32

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Micro-cantilevers for non-destructive characterization of nanograss uniformity

Petersen, Dirch H., Wang, Fei, Olesen, Mikkel B., Wierzbicki, Rafal, Schmidt, Michael S., Nielsen, Peter F., Boggild, Peter, Hansen, Ole, Molhave, Kristian

Year:

2011

Language:

english

File:

PDF, 3.41 MB

english, 2011

33

[IEEE 2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM) - Singapore, Singapore (2014.6.2-2014.6.4)] 2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM) - Automated Micro Hall Effect measurements

Petersen, Dirch H., Henrichsen, Henrik H., Rong Lin,, Nielsen, Peter F., Hansen, Ole

Year:

2014

Language:

english

File:

PDF, 1.28 MB

english, 2014

34

Correction to Graphene Uniformity Conductance Mapping

Buron, Jonas D., Petersen, Dirch H., Bøggild, Peter, Cooke, David G., Hilke, Michael, Sun, Jie, Whiteway, Eric, Jessen, Bjarke Sørensen, Nielsen, Peter F., Hansen, Ole, Yurgens, August, Jepsen, Peter

Journal:

Year:

2015

File:

PDF, 103 KB

2015

35

Patched Green's function techniques for two-dimensional systems: Electronic behavior of bubbles and perforations in graphene

Settnes, Mikkel, Power, Stephen R., Lin, Jun, Petersen, Dirch H., Jauho, Antti-Pekka

Journal:

Physical Review B

Year:

2015

Language:

english

File:

PDF, 1.74 MB

english, 2015

36

Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles

Clarysse, Trudo H., Moussa, Alain, Leys, Frederik, Loo, Roger, Vandervorst, Wilfried, Benjamin, Mark C., Hillard, Robert J., Faifer, Vladimir N., Current, Michael I., Lin, Rong, Petersen, Dirch H.

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 135 KB

english, 2006

37

Three-way flexible cantilever probes for static contact

Wang, Fei, Petersen, Dirch H, Jensen, Helle V, Hansen, Christian, Mortensen, Dennis, Friis, Lars, Hansen, Ole

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 1.19 MB

english, 2011

38

Note: Optical fiber milled by focused ion beam and its application for Fabry-Pérot refractive index sensor

Yuan, Wu, Wang, Fei, Savenko, Alexey, Petersen, Dirch Hjorth, Bang, Ole

Journal:

Review of Scientific Instruments

Year:

2011

Language:

english

File:

PDF, 203 KB

english, 2011

39

Graphene mobility mapping

Buron, Jonas D., Pizzocchero, Filippo, Jepsen, Peter U., Petersen, Dirch H., Caridad, José M., Jessen, Bjarke S., Booth, Timothy J., Bøggild, Peter

Journal:

Scientific Reports

Year:

2015

Language:

english

File:

PDF, 920 KB

english, 2015

40

Sensitivity of resistive and Hall measurements to local inhomogeneities: Finite-field, intensity, and area corrections

Koon, Daniel W., Wang, Fei, Petersen, Dirch Hjorth, Hansen, Ole

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 523 KB

english, 2014

41

Sensitivity analysis explains quasi-one-dimensional current transport in two-dimensional materials

Boll, Mads, Lotz, Mikkel R., Hansen, Ole, Wang, Fei, Kjær, Daniel, Bøggild, Peter, Petersen, Dirch H.

Journal:

Physical Review B

Year:

2014

Language:

english

File:

PDF, 3.19 MB

english, 2014

42

Characterization of positional errors and their influence on micro four-point probe measurements on a 100 nm Ru film

Kjaer, Daniel, Hansen, Ole, Østerberg, Frederik Westergaard, Henrichsen, Henrik Hartmann, Markvardsen, Christian, Nielsen, Peter Folmer, Petersen, Dirch Hjorth

Journal:

Measurement Science and Technology

Year:

2015

Language:

english

File:

PDF, 1.07 MB

english, 2015

43

Graphene transport properties upon exposure to PMMA processing and heat treatments

Gammelgaard, Lene, Caridad, José M, Cagliani, Alberto, Mackenzie, David M A, Petersen, Dirch H, Booth, Timothy J, Bøggild, Peter

Journal:

Year:

2014

File:

PDF, 1.25 MB

2014

44

Graphene transport properties upon exposure to PMMA processing and heat treatments

Gammelgaard, Lene, Caridad, José M, Cagliani, Alberto, Mackenzie, David M A, Petersen, Dirch H, Booth, Timothy J, Bøggild, Peter

Journal:

Year:

2014

Language:

english

File:

PDF, 1.25 MB

english, 2014

45

[IEEE 2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) - Hong Kong, China (2015.8.23-2015.8.28)] 2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) - Wafer-scale characterization of carrier dynamics in graphene

Buron, Jonas C. D., Hjort-Petersen, Dirch, Boggild, Peter, Jepsen, Peter Uhd

Year:

2015

Language:

english

File:

PDF, 311 KB

english, 2015

46

Fabrication of CVD graphene-based devices via laser ablation for wafer-scale characterization

Mackenzie, David M A, Buron, Jonas D, Whelan, Patrick R, Jessen, Bjarke S, Silajdźić, Adnan, Pesquera, Amaia, Centeno, Alba, Zurutuza, Amaia, Bøggild, Peter, Petersen, Dirch H

Journal:

Year:

2015

Language:

english

File:

PDF, 1.29 MB

english, 2015

47

Terahertz wafer-scale mobility mapping of graphene on insulating substrates without a gate

Buron, Jonas D., Mackenzie, David M. A., Petersen, Dirch. H., Pesquera, Amaia, Centeno, Alba, Bøggild, Peter, Zurutuza, Amaia, Jepsen, Peter U.

Journal:

Year:

2015

Language:

english

File:

PDF, 2.38 MB

english, 2015

48

Bubbles in graphene - a computational study

Settnes, Mikkel, Power, Stephen R, Lin, Jun, Petersen, Dirch H, Jauho, Antti-Pekka

Journal:

Journal of Physics Conference Series

Year:

2015

Language:

english

File:

PDF, 1.83 MB

english, 2015

49

Contactless graphene conductance measurements: the effect of device fabrication on terahertz time-domain spectroscopy

Mackenzie, David M.A., Buron, Jonas D., Boaggild, Peter, Jepsen, Peter U., Petersen, Dirch H.

Journal:

International Journal of Nanotechnology

Year:

2016

Language:

english

File:

PDF, 1.41 MB

english, 2016

50

Mesoscopic current transport in two-dimensional materials with grain boundaries: Four-point probe resistance and Hall effect

Lotz, Mikkel R., Boll, Mads, Østerberg, Frederik W., Hansen, Ole, Petersen, Dirch H.

Journal:

Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 1.61 MB

english, 2016